JPH0642221Y2 - 補助光学装置付テストヘツド - Google Patents
補助光学装置付テストヘツドInfo
- Publication number
- JPH0642221Y2 JPH0642221Y2 JP11931186U JP11931186U JPH0642221Y2 JP H0642221 Y2 JPH0642221 Y2 JP H0642221Y2 JP 11931186 U JP11931186 U JP 11931186U JP 11931186 U JP11931186 U JP 11931186U JP H0642221 Y2 JPH0642221 Y2 JP H0642221Y2
- Authority
- JP
- Japan
- Prior art keywords
- test
- wafer
- test head
- microscope
- performance board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012360 testing method Methods 0.000 title claims description 66
- 230000003287 optical effect Effects 0.000 claims description 15
- 239000000523 sample Substances 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000008054 signal transmission Effects 0.000 description 3
- 238000012790 confirmation Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 206010047513 Vision blurred Diseases 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11931186U JPH0642221Y2 (ja) | 1986-08-01 | 1986-08-01 | 補助光学装置付テストヘツド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11931186U JPH0642221Y2 (ja) | 1986-08-01 | 1986-08-01 | 補助光学装置付テストヘツド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6325385U JPS6325385U (en]) | 1988-02-19 |
| JPH0642221Y2 true JPH0642221Y2 (ja) | 1994-11-02 |
Family
ID=31006563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11931186U Expired - Lifetime JPH0642221Y2 (ja) | 1986-08-01 | 1986-08-01 | 補助光学装置付テストヘツド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0642221Y2 (en]) |
-
1986
- 1986-08-01 JP JP11931186U patent/JPH0642221Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6325385U (en]) | 1988-02-19 |
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